Fabrication of Radially Symmetric Graded Porous Silicon using a Novel Cell Design

Persistent Link:
http://hdl.handle.net/10150/614761
Title:
Fabrication of Radially Symmetric Graded Porous Silicon using a Novel Cell Design
Author:
Zhao, Mingrui; Keswani, Manish
Affiliation:
Univ Arizona, Mat Sci & Engn
Issue Date:
2016-04-22
Publisher:
NATURE PUBLISHING GROUP
Citation:
Fabrication of Radially Symmetric Graded Porous Silicon using a Novel Cell Design 2016, 6:24864 Scientific Reports
Journal:
Scientific Reports
Rights:
This work is licensed under a Creative Commons Attribution 4.0 International License.
Collection Information:
This item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at repository@u.library.arizona.edu.
Abstract:
A contactless method using a novel design of the experimental cell for formation of porous silicon with morphological gradient is reported. Fabricated porous silicon layers show a large distribution in porosity, pore size and depth along the radius of the samples. Symmetrical arrangements of morphology gradient were successfully formulated radially on porous films and the formation was attributed to decreasing current density radially inward on the silicon surface exposed to Triton (R) X-100 containing HF based etchant solution. Increasing the surfactant concentration increases the pore depth gradient but has a reverse effect on the pore size distribution. Interestingly, when dimethyl sulfoxide was used instead of Triton (R) X-100 in the etchant solution, no such morphological gradients were observed and a homogeneous porous film was formed.
ISSN:
2045-2322
DOI:
10.1038/srep24864
Keywords:
MACROPOROUS SILICON; PHOTONIC CRYSTALS; GRADIENTS; BEHAVIOR; LUMINESCENCE; TECHNOLOGY; ATTACHMENT; BIOSENSOR; SURFACE
Version:
Final published version
Sponsors:
The authors would like to thank Applied Materials, Inc. for partial support of this work.
Additional Links:
http://www.nature.com/articles/srep24864

Full metadata record

DC FieldValue Language
dc.contributor.authorZhao, Mingruien
dc.contributor.authorKeswani, Manishen
dc.date.accessioned2016-06-24T23:32:01Z-
dc.date.available2016-06-24T23:32:01Z-
dc.date.issued2016-04-22-
dc.identifier.citationFabrication of Radially Symmetric Graded Porous Silicon using a Novel Cell Design 2016, 6:24864 Scientific Reportsen
dc.identifier.issn2045-2322-
dc.identifier.doi10.1038/srep24864-
dc.identifier.urihttp://hdl.handle.net/10150/614761-
dc.description.abstractA contactless method using a novel design of the experimental cell for formation of porous silicon with morphological gradient is reported. Fabricated porous silicon layers show a large distribution in porosity, pore size and depth along the radius of the samples. Symmetrical arrangements of morphology gradient were successfully formulated radially on porous films and the formation was attributed to decreasing current density radially inward on the silicon surface exposed to Triton (R) X-100 containing HF based etchant solution. Increasing the surfactant concentration increases the pore depth gradient but has a reverse effect on the pore size distribution. Interestingly, when dimethyl sulfoxide was used instead of Triton (R) X-100 in the etchant solution, no such morphological gradients were observed and a homogeneous porous film was formed.en
dc.description.sponsorshipThe authors would like to thank Applied Materials, Inc. for partial support of this work.en
dc.language.isoenen
dc.publisherNATURE PUBLISHING GROUPen
dc.relation.urlhttp://www.nature.com/articles/srep24864en
dc.rightsThis work is licensed under a Creative Commons Attribution 4.0 International License.en
dc.subjectMACROPOROUS SILICONen
dc.subjectPHOTONIC CRYSTALSen
dc.subjectGRADIENTSen
dc.subjectBEHAVIORen
dc.subjectLUMINESCENCEen
dc.subjectTECHNOLOGYen
dc.subjectATTACHMENTen
dc.subjectBIOSENSORen
dc.subjectSURFACEen
dc.titleFabrication of Radially Symmetric Graded Porous Silicon using a Novel Cell Designen
dc.typeArticleen
dc.contributor.departmentUniv Arizona, Mat Sci & Engnen
dc.identifier.journalScientific Reportsen
dc.description.collectioninformationThis item from the UA Faculty Publications collection is made available by the University of Arizona with support from the University of Arizona Libraries. If you have questions, please contact us at repository@u.library.arizona.edu.en
dc.eprint.versionFinal published versionen
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