Persistent Link:
http://hdl.handle.net/10150/581252
Title:
High Precision Optical Surface Metrology using Deflectometry
Author:
Huang, Run
Issue Date:
2015
Publisher:
The University of Arizona.
Rights:
Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
Abstract:
Software Configurable Optical Test System (SCOTS) developed at University of Arizona is a highly efficient optical metrology technique based on the principle of deflectometry, which can achieve comparable accuracy with interferometry but with low-cost hardware. In a SCOTS test, an LCD display is used to generate structured light pattern to illuminate the test optics and the reflected light is captured by a digital camera. The surface slope of test optics is determined by triangulation of the display pixels, test optics, and the camera. The surface shape is obtained by the integration of the slopes. Comparing to interferometry, which has long served as an accurate non-contact optical metrology technology, SCOTS overcomes the limitation of dynamic range and sensitivity to environment. It is able to achieve high dynamic range slope measurement without requiring null optics. In this dissertation, the sensitivity and performance of the test system have been analyzed comprehensively. Sophisticated calibrations of system components have been investigated and implemented in different metrology projects to push this technology to a higher accuracy including low-order terms. A compact on-axis SCOTS system lowered the testing geometry sensitivity in the metrology of 1-meter highly aspheric secondary mirror of Large Binocular Telescope. Sub-nm accuracy was achieved in testing a high precision elliptical X-ray mirror by using reference calibration. A well-calibrated SCOTS was successfully constructed and is, at the time of writing this dissertation, being used to provide surface metrology feedback for the fabrication of the primary mirror of Daniel K. Inouye Solar Telescope which is a 4-meter off-axis parabola with more than 8 mm aspherical departure.
Type:
text; Electronic Dissertation
Keywords:
Optical Sciences
Degree Name:
Ph.D.
Degree Level:
doctoral
Degree Program:
Graduate College; Optical Sciences
Degree Grantor:
University of Arizona
Advisor:
Burge, James H.

Full metadata record

DC FieldValue Language
dc.language.isoen_USen
dc.titleHigh Precision Optical Surface Metrology using Deflectometryen_US
dc.creatorHuang, Runen
dc.contributor.authorHuang, Runen
dc.date.issued2015en
dc.publisherThe University of Arizona.en
dc.rightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.en
dc.description.abstractSoftware Configurable Optical Test System (SCOTS) developed at University of Arizona is a highly efficient optical metrology technique based on the principle of deflectometry, which can achieve comparable accuracy with interferometry but with low-cost hardware. In a SCOTS test, an LCD display is used to generate structured light pattern to illuminate the test optics and the reflected light is captured by a digital camera. The surface slope of test optics is determined by triangulation of the display pixels, test optics, and the camera. The surface shape is obtained by the integration of the slopes. Comparing to interferometry, which has long served as an accurate non-contact optical metrology technology, SCOTS overcomes the limitation of dynamic range and sensitivity to environment. It is able to achieve high dynamic range slope measurement without requiring null optics. In this dissertation, the sensitivity and performance of the test system have been analyzed comprehensively. Sophisticated calibrations of system components have been investigated and implemented in different metrology projects to push this technology to a higher accuracy including low-order terms. A compact on-axis SCOTS system lowered the testing geometry sensitivity in the metrology of 1-meter highly aspheric secondary mirror of Large Binocular Telescope. Sub-nm accuracy was achieved in testing a high precision elliptical X-ray mirror by using reference calibration. A well-calibrated SCOTS was successfully constructed and is, at the time of writing this dissertation, being used to provide surface metrology feedback for the fabrication of the primary mirror of Daniel K. Inouye Solar Telescope which is a 4-meter off-axis parabola with more than 8 mm aspherical departure.en
dc.typetexten
dc.typeElectronic Dissertationen
dc.subjectOptical Sciencesen
thesis.degree.namePh.D.en
thesis.degree.leveldoctoralen
thesis.degree.disciplineGraduate Collegeen
thesis.degree.disciplineOptical Sciencesen
thesis.degree.grantorUniversity of Arizonaen
dc.contributor.advisorBurge, James H.en
dc.contributor.committeememberBurge, James H.en
dc.contributor.committeememberHua, Hongen
dc.contributor.committeememberSu, Pengen
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