Plastic deformation in silicon at room temperature as a mode for stacking fault formation

Persistent Link:
http://hdl.handle.net/10150/566680
Title:
Plastic deformation in silicon at room temperature as a mode for stacking fault formation
Author:
Coppus, George Mitchell, 1953-
Issue Date:
1978
Publisher:
The University of Arizona.
Rights:
Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
Type:
text; Thesis-Reproduction (electronic)
Keywords:
Semiconductors -- Defects.; Semiconductor wafers.
Degree Name:
M.S.
Degree Level:
masters
Degree Program:
Metallurgical Engineering; Graduate College
Degree Grantor:
University of Arizona

Full metadata record

DC FieldValue Language
dc.language.isoen_USen
dc.titlePlastic deformation in silicon at room temperature as a mode for stacking fault formationen
dc.creatorCoppus, George Mitchell, 1953-en
dc.contributor.authorCoppus, George Mitchell, 1953-en
dc.date.issued1978en
dc.publisherThe University of Arizona.en
dc.rightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.en
dc.description.noteThis item was digitized from a paper original and/or a microfilm copy. If you need higher-resolution images for any content in this item, please contact us at repository@u.library.arizona.edu.en
dc.typetexten
dc.typeThesis-Reproduction (electronic)en
dc.subjectSemiconductors -- Defects.en
dc.subjectSemiconductor wafers.en
thesis.degree.nameM.S.en
thesis.degree.levelmastersen
thesis.degree.disciplineMetallurgical Engineeringen
thesis.degree.disciplineGraduate Collegeen
thesis.degree.grantorUniversity of Arizonaen
dc.identifier.oclc4240037en
dc.identifier.bibrecord.b18102505en
dc.identifier.callnumberE9791 1978 151en
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