Cold-wall low-pressure chemical-vapor-deposited silicon nitride for use as the undergate dielectric in field-effect transistors by David Robert Clark.

Persistent Link:
http://hdl.handle.net/10150/566378
Title:
Cold-wall low-pressure chemical-vapor-deposited silicon nitride for use as the undergate dielectric in field-effect transistors by David Robert Clark.
Author:
Clark, David Robert
Issue Date:
1981
Publisher:
The University of Arizona.
Rights:
Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
Type:
text; Thesis-Reproduction (electronic)
Keywords:
Field-effect transistors.; Dielectric films.; Electric insulators and insulation -- Silicon nitride.; Silicon nitride.
Degree Name:
M.S.
Degree Level:
masters
Degree Program:
Electrical Engineering; Graduate College
Degree Grantor:
University of Arizona

Full metadata record

DC FieldValue Language
dc.language.isoen_USen
dc.titleCold-wall low-pressure chemical-vapor-deposited silicon nitride for use as the undergate dielectric in field-effect transistors by David Robert Clark.en
dc.creatorClark, David Roberten
dc.contributor.authorClark, David Roberten
dc.date.issued1981en
dc.publisherThe University of Arizona.en
dc.rightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.en
dc.description.noteThis item was digitized from a paper original and/or a microfilm copy. If you need higher-resolution images for any content in this item, please contact us at repository@u.library.arizona.edu.en
dc.typetexten
dc.typeThesis-Reproduction (electronic)en
dc.subjectField-effect transistors.en
dc.subjectDielectric films.en
dc.subjectElectric insulators and insulation -- Silicon nitride.en
dc.subjectSilicon nitride.en
thesis.degree.nameM.S.en
thesis.degree.levelmastersen
thesis.degree.disciplineElectrical Engineeringen
thesis.degree.disciplineGraduate Collegeen
thesis.degree.grantorUniversity of Arizonaen
dc.identifier.oclc8724858en
dc.identifier.bibrecord.b1392199xen
dc.identifier.callnumberE9791 1981 550en
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