Evaluation of CVD tungsten metallization for integrated circuit application

Persistent Link:
http://hdl.handle.net/10150/557500
Title:
Evaluation of CVD tungsten metallization for integrated circuit application
Author:
Blacke, Douglas Otto
Issue Date:
1980
Publisher:
The University of Arizona.
Rights:
Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
Type:
text; Thesis-Reproduction (electronic)
Keywords:
Tungsten -- Electrometallurgy.; Diodes, Schottky-barrier.; Electrodes, Tungsten.
Degree Name:
M.S.
Degree Level:
masters
Degree Program:
Electrical Engineering; Graduate College
Degree Grantor:
University of Arizona

Full metadata record

DC FieldValue Language
dc.language.isoen_USen
dc.titleEvaluation of CVD tungsten metallization for integrated circuit applicationen
dc.creatorBlacke, Douglas Ottoen
dc.contributor.authorBlacke, Douglas Ottoen
dc.date.issued1980en
dc.publisherThe University of Arizona.en
dc.rightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.en
dc.description.noteThis item was digitized from a paper original and/or a microfilm copy. If you need higher-resolution images for any content in this item, please contact us at repository@u.library.arizona.edu.en
dc.typetexten
dc.typeThesis-Reproduction (electronic)en
dc.subjectTungsten -- Electrometallurgy.en
dc.subjectDiodes, Schottky-barrier.en
dc.subjectElectrodes, Tungsten.en
thesis.degree.nameM.S.en
thesis.degree.levelmastersen
thesis.degree.disciplineElectrical Engineeringen
thesis.degree.disciplineGraduate Collegeen
thesis.degree.grantorUniversity of Arizonaen
dc.identifier.oclc7749118en
dc.identifier.bibrecord.b13519190en
dc.identifier.callnumberE9791 1980 304en
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