A model for boron diffusion into silicon: the effect of oxide growth

Persistent Link:
http://hdl.handle.net/10150/554621
Title:
A model for boron diffusion into silicon: the effect of oxide growth
Author:
Winton, MIchael Calhoun, 1945-
Issue Date:
1973
Publisher:
The University of Arizona.
Rights:
Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
Type:
text; Thesis-Reproduction (electronic)
Keywords:
Diffusion -- Mathematical models.; Silicon oxide.; Boron.
Degree Name:
M.S.
Degree Level:
masters
Degree Program:
Electrical Engineering; Graduate College
Degree Grantor:
University of Arizona

Full metadata record

DC FieldValue Language
dc.language.isoen_USen
dc.titleA model for boron diffusion into silicon: the effect of oxide growthen
dc.creatorWinton, MIchael Calhoun, 1945-en
dc.contributor.authorWinton, MIchael Calhoun, 1945-en
dc.date.issued1973en
dc.publisherThe University of Arizona.en
dc.rightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.en
dc.description.noteThis item was digitized from a paper original and/or a microfilm copy. If you need higher-resolution images for any content in this item, please contact us at repository@u.library.arizona.edu.en
dc.typetexten
dc.typeThesis-Reproduction (electronic)en
dc.subjectDiffusion -- Mathematical models.en
dc.subjectSilicon oxide.en
dc.subjectBoron.en
thesis.degree.nameM.S.en
thesis.degree.levelmastersen
thesis.degree.disciplineElectrical Engineeringen
thesis.degree.disciplineGraduate Collegeen
thesis.degree.grantorUniversity of Arizonaen
dc.identifier.oclc29290591en
dc.identifier.bibrecord.b31102815en
dc.identifier.callnumberE9791 1973 63en
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