Persistent Link:
http://hdl.handle.net/10150/347836
Title:
Radio frequency glow discharge sputtering of thin films
Author:
Peters, Timothy John, 1950-
Issue Date:
1973
Publisher:
The University of Arizona.
Rights:
Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
Type:
text; Thesis-Reproduction (electronic)
Keywords:
Sputtering (Physics); Thin films.
Degree Name:
M.S.
Degree Level:
masters
Degree Program:
Optical Science; Graduate College
Degree Grantor:
University of Arizona

Full metadata record

DC FieldValue Language
dc.language.isoen_USen
dc.titleRadio frequency glow discharge sputtering of thin filmsen
dc.creatorPeters, Timothy John, 1950-en
dc.contributor.authorPeters, Timothy John, 1950-en
dc.date.issued1973en
dc.publisherThe University of Arizona.en
dc.rightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.en
dc.description.noteThis item was digitized from a paper original and/or a microfilm copy. If you need higher-resolution images for any content in this item, please contact us at repository@u.library.arizona.edu.en
dc.typetexten
dc.typeThesis-Reproduction (electronic)en
dc.subjectSputtering (Physics)en
dc.subjectThin films.en
thesis.degree.nameM.S.en
thesis.degree.levelmastersen
thesis.degree.disciplineOptical Scienceen
thesis.degree.disciplineGraduate Collegeen
thesis.degree.grantorUniversity of Arizonaen
dc.identifier.oclc29823399en
dc.identifier.bibrecord.b31333278en
dc.identifier.callnumberE9791 1973 441en
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