Persistent Link:
http://hdl.handle.net/10150/318187
Title:
Sputtering of thin film resistors
Author:
Peterson, Myron Jan, 1939-
Issue Date:
1969
Publisher:
The University of Arizona.
Rights:
Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
Type:
text; Thesis-Reproduction (electronic)
Keywords:
Metallic films.; Electric resistors.
Degree Name:
M.S.
Degree Level:
masters
Degree Program:
Electrical Engineering; Graduate College
Degree Grantor:
University of Arizona

Full metadata record

DC FieldValue Language
dc.language.isoen_USen_US
dc.titleSputtering of thin film resistorsen_US
dc.creatorPeterson, Myron Jan, 1939-en_US
dc.contributor.authorPeterson, Myron Jan, 1939-en_US
dc.date.issued1969en_US
dc.publisherThe University of Arizona.en_US
dc.rightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.en_US
dc.typetexten_US
dc.typeThesis-Reproduction (electronic)en_US
dc.subjectMetallic films.en_US
dc.subjectElectric resistors.en_US
thesis.degree.nameM.S.en_US
thesis.degree.levelmastersen_US
thesis.degree.disciplineElectrical Engineeringen_US
thesis.degree.disciplineGraduate Collegeen_US
thesis.degree.grantorUniversity of Arizonaen_US
dc.identifier.oclc28090274en_US
dc.identifier.bibrecord.b28057053en_US
dc.identifier.callnumberE9791 1969 137en_US
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