AN ELECTRON MICROSCOPE INVESTIGATION OF ION-IMPLANTED SILICON CONTAINING PRE-INDUCED STACKING FAULTS

Persistent Link:
http://hdl.handle.net/10150/298441
Title:
AN ELECTRON MICROSCOPE INVESTIGATION OF ION-IMPLANTED SILICON CONTAINING PRE-INDUCED STACKING FAULTS
Author:
Shevlin, Craig Martin, 1943-
Issue Date:
1978
Publisher:
The University of Arizona.
Rights:
Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
Type:
text; Dissertation-Reproduction (electronic)
Keywords:
Semiconductor doping.; Ion implantation.; Semiconductors -- Effect of radiation on.
Degree Name:
Ph.D.
Degree Level:
doctoral
Degree Program:
Graduate College; Metallurgical Engineering
Degree Grantor:
University of Arizona

Full metadata record

DC FieldValue Language
dc.language.isoen_USen_US
dc.titleAN ELECTRON MICROSCOPE INVESTIGATION OF ION-IMPLANTED SILICON CONTAINING PRE-INDUCED STACKING FAULTSen_US
dc.creatorShevlin, Craig Martin, 1943-en_US
dc.contributor.authorShevlin, Craig Martin, 1943-en_US
dc.date.issued1978en_US
dc.publisherThe University of Arizona.en_US
dc.rightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.en_US
dc.typetexten_US
dc.typeDissertation-Reproduction (electronic)en_US
dc.subjectSemiconductor doping.en_US
dc.subjectIon implantation.en_US
dc.subjectSemiconductors -- Effect of radiation on.en_US
thesis.degree.namePh.D.en_US
thesis.degree.leveldoctoralen_US
thesis.degree.disciplineGraduate Collegeen_US
thesis.degree.disciplineMetallurgical Engineeringen_US
thesis.degree.grantorUniversity of Arizonaen_US
dc.identifier.proquest7906412en_US
dc.identifier.oclc6411083en_US
dc.identifier.bibrecord.b12988510en_US
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