A scanning grating technique for measurement of submicron focused spots

Persistent Link:
http://hdl.handle.net/10150/291569
Title:
A scanning grating technique for measurement of submicron focused spots
Author:
Mortimer, Beth Ann, 1965-
Issue Date:
1988
Publisher:
The University of Arizona.
Rights:
Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
Abstract:
Many applications in optical research require the use of diffraction limited point images with reduced spot sizes. The instrumentation that evaluates these small diameter images must have high resolution (sub-micron) capabilities. One method used to measure sub-micron optical point images is a scanning grating technique. However, many characteristics of this measurement technique have not been fully examined. In this paper, the sensitivity of this measurement technique to the scanning mechanism, beam characteristics, and grating tilt is evaluated.
Type:
text; Thesis-Reproduction (electronic)
Keywords:
Optical storage devices -- Equipment and supplies.; Diffraction gratings.; Scanning systems.
Degree Name:
M.S.
Degree Level:
masters
Degree Program:
Graduate College; Electrical and Computer Engineering
Degree Grantor:
University of Arizona
Advisor:
Kostuk, Raymond K.

Full metadata record

DC FieldValue Language
dc.language.isoen_USen_US
dc.titleA scanning grating technique for measurement of submicron focused spotsen_US
dc.creatorMortimer, Beth Ann, 1965-en_US
dc.contributor.authorMortimer, Beth Ann, 1965-en_US
dc.date.issued1988en_US
dc.publisherThe University of Arizona.en_US
dc.rightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.en_US
dc.description.abstractMany applications in optical research require the use of diffraction limited point images with reduced spot sizes. The instrumentation that evaluates these small diameter images must have high resolution (sub-micron) capabilities. One method used to measure sub-micron optical point images is a scanning grating technique. However, many characteristics of this measurement technique have not been fully examined. In this paper, the sensitivity of this measurement technique to the scanning mechanism, beam characteristics, and grating tilt is evaluated.en_US
dc.typetexten_US
dc.typeThesis-Reproduction (electronic)en_US
dc.subjectOptical storage devices -- Equipment and supplies.en_US
dc.subjectDiffraction gratings.en_US
dc.subjectScanning systems.en_US
thesis.degree.nameM.S.en_US
thesis.degree.levelmastersen_US
thesis.degree.disciplineGraduate Collegeen_US
thesis.degree.disciplineElectrical and Computer Engineeringen_US
thesis.degree.grantorUniversity of Arizonaen_US
dc.contributor.advisorKostuk, Raymond K.en_US
dc.identifier.proquest1335432en_US
dc.identifier.oclc22271741en_US
dc.identifier.bibrecord.b17390540en_US
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