A model for estimating allowable transition metal contamination in DRAMs

Persistent Link:
http://hdl.handle.net/10150/291463
Title:
A model for estimating allowable transition metal contamination in DRAMs
Author:
Schmid, John Robert, 1952-
Issue Date:
1993
Publisher:
The University of Arizona.
Rights:
Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
Abstract:
Due to new memory-cell architectures, the leakage-current requirements for semiconductor memories will become less stringent with increased levels of integration. The implication of these requirements with regard to allowable metallic contamination levels is investigated with a one-dimensional model based on Shockley-Read-Hall generation-recombination. The model was developed to predict leakage-current in carrier-depleted regions as a function of basic process and metallic contaminant parameters. As device dimensions are reduced, transition metal homogeneous contamination in process chemicals can be an important source of generation-recombination centers that result in the dominant generation-current in the space-charge region. The model allows an estimation of an upper bound for transition metal contamination in advanced processes and is applied for DRAM leakage predictions. Using the model, it is demonstrated that the trend toward lower leakage-current density requirements reverses after the 64-Mbit generation DRAM as a result of memory-cell architecture trends which significantly reduce the space-charge volume.
Type:
text; Thesis-Reproduction (electronic)
Keywords:
Engineering, Electronics and Electrical.; Physics, Condensed Matter.
Degree Name:
M.S.
Degree Level:
masters
Degree Program:
Graduate College; Electrical Engineering
Degree Grantor:
University of Arizona
Advisor:
Schrimpf, Ronald D.

Full metadata record

DC FieldValue Language
dc.language.isoen_USen_US
dc.titleA model for estimating allowable transition metal contamination in DRAMsen_US
dc.creatorSchmid, John Robert, 1952-en_US
dc.contributor.authorSchmid, John Robert, 1952-en_US
dc.date.issued1993en_US
dc.publisherThe University of Arizona.en_US
dc.rightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.en_US
dc.description.abstractDue to new memory-cell architectures, the leakage-current requirements for semiconductor memories will become less stringent with increased levels of integration. The implication of these requirements with regard to allowable metallic contamination levels is investigated with a one-dimensional model based on Shockley-Read-Hall generation-recombination. The model was developed to predict leakage-current in carrier-depleted regions as a function of basic process and metallic contaminant parameters. As device dimensions are reduced, transition metal homogeneous contamination in process chemicals can be an important source of generation-recombination centers that result in the dominant generation-current in the space-charge region. The model allows an estimation of an upper bound for transition metal contamination in advanced processes and is applied for DRAM leakage predictions. Using the model, it is demonstrated that the trend toward lower leakage-current density requirements reverses after the 64-Mbit generation DRAM as a result of memory-cell architecture trends which significantly reduce the space-charge volume.en_US
dc.typetexten_US
dc.typeThesis-Reproduction (electronic)en_US
dc.subjectEngineering, Electronics and Electrical.en_US
dc.subjectPhysics, Condensed Matter.en_US
thesis.degree.nameM.S.en_US
thesis.degree.levelmastersen_US
thesis.degree.disciplineGraduate Collegeen_US
thesis.degree.disciplineElectrical Engineeringen_US
thesis.degree.grantorUniversity of Arizonaen_US
dc.contributor.advisorSchrimpf, Ronald D.en_US
dc.identifier.proquest1355158en_US
dc.identifier.bibrecord.b310902299en_US
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