Persistent Link:
http://hdl.handle.net/10150/289008
Title:
Phase shifting interferometric imaging ellipsometer
Author:
Wells, Conrad
Issue Date:
1999
Publisher:
The University of Arizona.
Rights:
Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
Abstract:
A novel imaging ellipsometer has been developed; the phase shifting interferometric imaging ellipsometer (PSIIE) is the first ellipsometer to use phase-shifting interferometry for data acquisition. The only moving part in the system is a solid state PZT. The PSIIE uses a polarization interferometer, followed by a Wollaston prism, to obtain simultaneously, samples of the S and P polarization component interferograms. Interferogram. phase yields the ellipsometric parameter, Δ, while the fringe modulation yields the tangent of the ellipsometric parameter Ψ. The instrument can perform multiple wavelength and multiple angle-of-incidence ellipsometry over the entire visible range with the addition of a tunable laser source. Repeatability of the prototype instrument approaches 0.15° for the measurement of Δ, and 0.4° for Ψ. Absolute accuracies are 1° for Δ and Ψ. Calculations indicate that hardware and software improvements would achieve a precision and absolute accuracy below 0.1°.
Type:
text; Dissertation-Reproduction (electronic)
Keywords:
Physics, Optics.
Degree Name:
Ph.D.
Degree Level:
doctoral
Degree Program:
Graduate College; Optical Sciences
Degree Grantor:
University of Arizona
Advisor:
Wyant, James C.

Full metadata record

DC FieldValue Language
dc.language.isoen_USen_US
dc.titlePhase shifting interferometric imaging ellipsometeren_US
dc.creatorWells, Conraden_US
dc.contributor.authorWells, Conraden_US
dc.date.issued1999en_US
dc.publisherThe University of Arizona.en_US
dc.rightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.en_US
dc.description.abstractA novel imaging ellipsometer has been developed; the phase shifting interferometric imaging ellipsometer (PSIIE) is the first ellipsometer to use phase-shifting interferometry for data acquisition. The only moving part in the system is a solid state PZT. The PSIIE uses a polarization interferometer, followed by a Wollaston prism, to obtain simultaneously, samples of the S and P polarization component interferograms. Interferogram. phase yields the ellipsometric parameter, Δ, while the fringe modulation yields the tangent of the ellipsometric parameter Ψ. The instrument can perform multiple wavelength and multiple angle-of-incidence ellipsometry over the entire visible range with the addition of a tunable laser source. Repeatability of the prototype instrument approaches 0.15° for the measurement of Δ, and 0.4° for Ψ. Absolute accuracies are 1° for Δ and Ψ. Calculations indicate that hardware and software improvements would achieve a precision and absolute accuracy below 0.1°.en_US
dc.typetexten_US
dc.typeDissertation-Reproduction (electronic)en_US
dc.subjectPhysics, Optics.en_US
thesis.degree.namePh.D.en_US
thesis.degree.leveldoctoralen_US
thesis.degree.disciplineGraduate Collegeen_US
thesis.degree.disciplineOptical Sciencesen_US
thesis.degree.grantorUniversity of Arizonaen_US
dc.contributor.advisorWyant, James C.en_US
dc.identifier.proquest9946788en_US
dc.identifier.bibrecord.b39904623en_US
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