Persistent Link:
http://hdl.handle.net/10150/278670
Title:
Fabrication of micro-optics using binary and graylevel masks
Author:
Simon, Daniel I, 1971-
Issue Date:
1998
Publisher:
The University of Arizona.
Rights:
Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
Abstract:
This thesis provides step by step instructions on how to design, layout, and fabricate diffractive optical elements (DOE). While there has been a great deal published on the design of DOEs, there are few publications detailing how to transform a design into a physical element. The thesis describes how to order a photomask and pattern an element. It provides recipes that I have used to etch DOEs with both an ion mill and a reactive ion etcher (RIE) at the Optical Sciences Center. The thesis includes characterization of the elements fabricated using these recipes. In addition the thesis looks at the design and fabrication of ring toric lenslets. A ring toric lenslet is a DOE that focuses light to a ring instead of a point. The ring toric lenslet has potential applications in the optical data storage industry. This thesis includes macros for the design and mask layout of binary and grayscale ring toric lenslets. Grayscale elements require special design, calibration, and mask layout steps not necessary for binary elements. Details of the design, calibration, mask layout, and fabrication of the grayscale element are included.
Type:
text; Thesis-Reproduction (electronic)
Keywords:
Engineering, Mechanical.; Physics, Optics.
Degree Name:
M.S.
Degree Level:
masters
Degree Program:
Graduate College; Optical Sciences
Degree Grantor:
University of Arizona
Advisor:
Descour, Michael

Full metadata record

DC FieldValue Language
dc.language.isoen_USen_US
dc.titleFabrication of micro-optics using binary and graylevel masksen_US
dc.creatorSimon, Daniel I, 1971-en_US
dc.contributor.authorSimon, Daniel I, 1971-en_US
dc.date.issued1998en_US
dc.publisherThe University of Arizona.en_US
dc.rightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.en_US
dc.description.abstractThis thesis provides step by step instructions on how to design, layout, and fabricate diffractive optical elements (DOE). While there has been a great deal published on the design of DOEs, there are few publications detailing how to transform a design into a physical element. The thesis describes how to order a photomask and pattern an element. It provides recipes that I have used to etch DOEs with both an ion mill and a reactive ion etcher (RIE) at the Optical Sciences Center. The thesis includes characterization of the elements fabricated using these recipes. In addition the thesis looks at the design and fabrication of ring toric lenslets. A ring toric lenslet is a DOE that focuses light to a ring instead of a point. The ring toric lenslet has potential applications in the optical data storage industry. This thesis includes macros for the design and mask layout of binary and grayscale ring toric lenslets. Grayscale elements require special design, calibration, and mask layout steps not necessary for binary elements. Details of the design, calibration, mask layout, and fabrication of the grayscale element are included.en_US
dc.typetexten_US
dc.typeThesis-Reproduction (electronic)en_US
dc.subjectEngineering, Mechanical.en_US
dc.subjectPhysics, Optics.en_US
thesis.degree.nameM.S.en_US
thesis.degree.levelmastersen_US
thesis.degree.disciplineGraduate Collegeen_US
thesis.degree.disciplineOptical Sciencesen_US
thesis.degree.grantorUniversity of Arizonaen_US
dc.contributor.advisorDescour, Michaelen_US
dc.identifier.proquest1391063en_US
dc.identifier.bibrecord.b38829940en_US
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