A knowledge acquisition scheme for fault diagnosis in complex manufacturing processes

Persistent Link:
http://hdl.handle.net/10150/278266
Title:
A knowledge acquisition scheme for fault diagnosis in complex manufacturing processes
Author:
Motaabbed, Asghar B., 1959-
Issue Date:
1992
Publisher:
The University of Arizona.
Rights:
Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
Abstract:
This thesis introduces the problem of knowledge acquisition in developing a Trouble Shooting Guide (TSG) for equipment used in integrated circuit manufacturing. TSG is considered as a first step in developing an Expert Diagnostic System (EDS). The research is focused on the acquisition and refinement of actual knowledge from the manufacturing domain, and a Hierarchical Data Collection (HDC) system is introduced to solve the problem of bottleneck in developing EDS. An integrated circuit manufacturing environment is introduced, and issues relating to the collection and assessment of knowledge concerning the performance of the machine park are discussed. Raw data about equipment used in manufacturing environment is studied and results are discussed. A systematic classification of symptoms, failures, and repair activities is presented.
Type:
text; Thesis-Reproduction (electronic)
Keywords:
Engineering, Electronics and Electrical.; Engineering, System Science.; Artificial Intelligence.; Computer Science.
Degree Name:
M.S.
Degree Level:
masters
Degree Program:
Graduate College
Degree Grantor:
University of Arizona
Advisor:
Cellier, Francois E.

Full metadata record

DC FieldValue Language
dc.language.isoen_USen_US
dc.titleA knowledge acquisition scheme for fault diagnosis in complex manufacturing processesen_US
dc.creatorMotaabbed, Asghar B., 1959-en_US
dc.contributor.authorMotaabbed, Asghar B., 1959-en_US
dc.date.issued1992en_US
dc.publisherThe University of Arizona.en_US
dc.rightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.en_US
dc.description.abstractThis thesis introduces the problem of knowledge acquisition in developing a Trouble Shooting Guide (TSG) for equipment used in integrated circuit manufacturing. TSG is considered as a first step in developing an Expert Diagnostic System (EDS). The research is focused on the acquisition and refinement of actual knowledge from the manufacturing domain, and a Hierarchical Data Collection (HDC) system is introduced to solve the problem of bottleneck in developing EDS. An integrated circuit manufacturing environment is introduced, and issues relating to the collection and assessment of knowledge concerning the performance of the machine park are discussed. Raw data about equipment used in manufacturing environment is studied and results are discussed. A systematic classification of symptoms, failures, and repair activities is presented.en_US
dc.typetexten_US
dc.typeThesis-Reproduction (electronic)en_US
dc.subjectEngineering, Electronics and Electrical.en_US
dc.subjectEngineering, System Science.en_US
dc.subjectArtificial Intelligence.en_US
dc.subjectComputer Science.en_US
thesis.degree.nameM.S.en_US
thesis.degree.levelmastersen_US
thesis.degree.disciplineGraduate Collegeen_US
thesis.degree.grantorUniversity of Arizonaen_US
dc.contributor.advisorCellier, Francois E.en_US
dc.identifier.proquest1351358en_US
dc.identifier.bibrecord.b27149614en_US
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