Persistent Link:
http://hdl.handle.net/10150/278211
Title:
Analysis of plasma etch defects utilizing a comb test structure
Author:
DeLoach, Charles Alan, 1960-
Issue Date:
1992
Publisher:
The University of Arizona.
Rights:
Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
Abstract:
Three metal compositions are patterned via plasma etching into comb structures. The comb structures have pitches of 4 μm, 5 μm, 7 μm and 12 μm, with a line width of 2 μm, on a field oxide of 8,000 Angstroms thickness, using <111> p-type substrates. These comb test structures have been used to determine the number of bridges, and thus the yield, of the metal compositions: pure aluminum, silicon(2%)-aluminum, and copper(0.5%)-silicon(2%)-aluminum. Bridge failures are photographed and classified according to the source of the defect. The defects due to plasma particles are used to determine a yield model for this etch process. Through the use of yield model and test structure data the etch process is evaluated for the different metal systems. This allows a quantitative comparison of the systems in terms of defect clustering, defect density and defect size distribution, and hence projections for the best yielding process via the yield model.
Type:
text; Thesis-Reproduction (electronic)
Keywords:
Engineering, Electronics and Electrical.
Degree Name:
M.S.
Degree Level:
masters
Degree Program:
Graduate College
Degree Grantor:
University of Arizona
Advisor:
Parks, Harold G.

Full metadata record

DC FieldValue Language
dc.language.isoen_USen_US
dc.titleAnalysis of plasma etch defects utilizing a comb test structureen_US
dc.creatorDeLoach, Charles Alan, 1960-en_US
dc.contributor.authorDeLoach, Charles Alan, 1960-en_US
dc.date.issued1992en_US
dc.publisherThe University of Arizona.en_US
dc.rightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.en_US
dc.description.abstractThree metal compositions are patterned via plasma etching into comb structures. The comb structures have pitches of 4 μm, 5 μm, 7 μm and 12 μm, with a line width of 2 μm, on a field oxide of 8,000 Angstroms thickness, using <111> p-type substrates. These comb test structures have been used to determine the number of bridges, and thus the yield, of the metal compositions: pure aluminum, silicon(2%)-aluminum, and copper(0.5%)-silicon(2%)-aluminum. Bridge failures are photographed and classified according to the source of the defect. The defects due to plasma particles are used to determine a yield model for this etch process. Through the use of yield model and test structure data the etch process is evaluated for the different metal systems. This allows a quantitative comparison of the systems in terms of defect clustering, defect density and defect size distribution, and hence projections for the best yielding process via the yield model.en_US
dc.typetexten_US
dc.typeThesis-Reproduction (electronic)en_US
dc.subjectEngineering, Electronics and Electrical.en_US
thesis.degree.nameM.S.en_US
thesis.degree.levelmastersen_US
thesis.degree.disciplineGraduate Collegeen_US
thesis.degree.grantorUniversity of Arizonaen_US
dc.contributor.advisorParks, Harold G.en_US
dc.identifier.proquest1350779en_US
dc.identifier.bibrecord.b25469605en_US
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