The use of digital signal processing techniques for the interferometric profiling of rough surfaces

Persistent Link:
http://hdl.handle.net/10150/277998
Title:
The use of digital signal processing techniques for the interferometric profiling of rough surfaces
Author:
Caber, Paul James, 1959-
Issue Date:
1991
Publisher:
The University of Arizona.
Rights:
Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
Abstract:
Conventional non-contact optical methods of surface profiling are limited in the range of surface heights that can be accurately measured due to phase ambiguity errors on steep local slopes. Instruments that have been developed thus far to avoid the problems with local slope typically suffer from poor measurement height resolution and slow measurement speeds. Contact profilometers such as stylus-based instruments suffer from poor lateral resolution due to the finite radius of the stylus tip, and slow measurement speeds, especially when two-dimensional scans of the surface are required. Stylus tips can also scratch delicate surfaces during the measurement. We propose a new method of optical, non-contact profiling of rough surfaces without the limitations on local slope that other methods suffer from. This new method utilizes interferometric techniques as well as digital signal processing algorithms to produce fast, accurate, and repeatable three-dimensional surface profile measurements on a wide variety of surfaces.
Type:
text; Thesis-Reproduction (electronic)
Keywords:
Engineering, Electronics and Electrical.; Physics, Optics.
Degree Name:
M.S.
Degree Level:
masters
Degree Program:
Graduate College
Degree Grantor:
University of Arizona
Advisor:
Hunt, Bobby R.

Full metadata record

DC FieldValue Language
dc.language.isoen_USen_US
dc.titleThe use of digital signal processing techniques for the interferometric profiling of rough surfacesen_US
dc.creatorCaber, Paul James, 1959-en_US
dc.contributor.authorCaber, Paul James, 1959-en_US
dc.date.issued1991en_US
dc.publisherThe University of Arizona.en_US
dc.rightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.en_US
dc.description.abstractConventional non-contact optical methods of surface profiling are limited in the range of surface heights that can be accurately measured due to phase ambiguity errors on steep local slopes. Instruments that have been developed thus far to avoid the problems with local slope typically suffer from poor measurement height resolution and slow measurement speeds. Contact profilometers such as stylus-based instruments suffer from poor lateral resolution due to the finite radius of the stylus tip, and slow measurement speeds, especially when two-dimensional scans of the surface are required. Stylus tips can also scratch delicate surfaces during the measurement. We propose a new method of optical, non-contact profiling of rough surfaces without the limitations on local slope that other methods suffer from. This new method utilizes interferometric techniques as well as digital signal processing algorithms to produce fast, accurate, and repeatable three-dimensional surface profile measurements on a wide variety of surfaces.en_US
dc.typetexten_US
dc.typeThesis-Reproduction (electronic)en_US
dc.subjectEngineering, Electronics and Electrical.en_US
dc.subjectPhysics, Optics.en_US
thesis.degree.nameM.S.en_US
thesis.degree.levelmastersen_US
thesis.degree.disciplineGraduate Collegeen_US
thesis.degree.grantorUniversity of Arizonaen_US
dc.contributor.advisorHunt, Bobby R.en_US
dc.identifier.proquest1346415en_US
dc.identifier.bibrecord.b27226505en_US
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