The design and development of an atmospheric and vacuum rotating wafer scanner

Persistent Link:
http://hdl.handle.net/10150/277901
Title:
The design and development of an atmospheric and vacuum rotating wafer scanner
Author:
Kalafatis, Stavros, 1965-
Issue Date:
1991
Publisher:
The University of Arizona.
Rights:
Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
Abstract:
A rotating wafer scanner was designed and developed in order to determine its operational feasibility and advantages over a linear wafer scanner. The scanner was first designed to operate at atmosphere. Each of its constituent parts were independently tested and when the final system was evaluated a 0.2 mum detection limit was observed. The latter result prompted the design and development of a vacuum rotating wafer scanner. The data obtained during the design and evaluation of the constituent parts of the latter system showed that particle detection in a vacuum is feasible.
Type:
text; Thesis-Reproduction (electronic)
Keywords:
Engineering, Electronics and Electrical.; Physics, Optics.
Degree Name:
M.S.
Degree Level:
masters
Degree Program:
Graduate College
Degree Grantor:
University of Arizona
Advisor:
O'Hanlon, John F.

Full metadata record

DC FieldValue Language
dc.language.isoen_USen_US
dc.titleThe design and development of an atmospheric and vacuum rotating wafer scanneren_US
dc.creatorKalafatis, Stavros, 1965-en_US
dc.contributor.authorKalafatis, Stavros, 1965-en_US
dc.date.issued1991en_US
dc.publisherThe University of Arizona.en_US
dc.rightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.en_US
dc.description.abstractA rotating wafer scanner was designed and developed in order to determine its operational feasibility and advantages over a linear wafer scanner. The scanner was first designed to operate at atmosphere. Each of its constituent parts were independently tested and when the final system was evaluated a 0.2 mum detection limit was observed. The latter result prompted the design and development of a vacuum rotating wafer scanner. The data obtained during the design and evaluation of the constituent parts of the latter system showed that particle detection in a vacuum is feasible.en_US
dc.typetexten_US
dc.typeThesis-Reproduction (electronic)en_US
dc.subjectEngineering, Electronics and Electrical.en_US
dc.subjectPhysics, Optics.en_US
thesis.degree.nameM.S.en_US
thesis.degree.levelmastersen_US
thesis.degree.disciplineGraduate Collegeen_US
thesis.degree.grantorUniversity of Arizonaen_US
dc.contributor.advisorO'Hanlon, John F.en_US
dc.identifier.proquest1344018en_US
dc.identifier.bibrecord.b26917324en_US
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