Finite element analysis of aerosol particle deposition on surfaces inside a clean room

Persistent Link:
http://hdl.handle.net/10150/277120
Title:
Finite element analysis of aerosol particle deposition on surfaces inside a clean room
Author:
Sannes, Kevin Markle, 1964-
Issue Date:
1989
Publisher:
The University of Arizona.
Rights:
Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
Abstract:
Aerosol particle deposition rates on surfaces inside a clean room are predicted by a model developed to account for particle convection, diffusion and sedimentation. External forces acting on the particle also influence the rate of deposition. Both electrical charge build up on product surfaces and temperature gradients in the air near the product surface are known to effect the rate of deposition. A description of an electrostatic and thermophoretic force on the particle is thus included in the model. The equations governing the particle deposition process and the approach used in obtaining a solution to these equations are both described. A finite element numerical solution is detailed, followed by a description of the electrostatic force models. Finally, predictions of the model are presented with a comparison to data experimentally obtained by other researchers.
Type:
text; Thesis-Reproduction (electronic)
Keywords:
Aerosols -- Mathematical models.; Finite element method -- Computer programs.; Clean rooms.; Electronic apparatus and appliances -- Contamination.; Environment, Controlled.
Degree Name:
M.S.
Degree Level:
masters
Degree Program:
Graduate College; Chemical Engineering
Degree Grantor:
University of Arizona
Advisor:
Peterson, Thomas W.

Full metadata record

DC FieldValue Language
dc.language.isoen_USen_US
dc.titleFinite element analysis of aerosol particle deposition on surfaces inside a clean roomen_US
dc.creatorSannes, Kevin Markle, 1964-en_US
dc.contributor.authorSannes, Kevin Markle, 1964-en_US
dc.date.issued1989en_US
dc.publisherThe University of Arizona.en_US
dc.rightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.en_US
dc.description.abstractAerosol particle deposition rates on surfaces inside a clean room are predicted by a model developed to account for particle convection, diffusion and sedimentation. External forces acting on the particle also influence the rate of deposition. Both electrical charge build up on product surfaces and temperature gradients in the air near the product surface are known to effect the rate of deposition. A description of an electrostatic and thermophoretic force on the particle is thus included in the model. The equations governing the particle deposition process and the approach used in obtaining a solution to these equations are both described. A finite element numerical solution is detailed, followed by a description of the electrostatic force models. Finally, predictions of the model are presented with a comparison to data experimentally obtained by other researchers.en_US
dc.typetexten_US
dc.typeThesis-Reproduction (electronic)en_US
dc.subjectAerosols -- Mathematical models.en_US
dc.subjectFinite element method -- Computer programs.en_US
dc.subjectClean rooms.en_US
dc.subjectElectronic apparatus and appliances -- Contamination.en_US
dc.subjectEnvironment, Controlled.en_US
thesis.degree.nameM.S.en_US
thesis.degree.levelmastersen_US
thesis.degree.disciplineGraduate Collegeen_US
thesis.degree.disciplineChemical Engineeringen_US
thesis.degree.grantorUniversity of Arizonaen_US
dc.contributor.advisorPeterson, Thomas W.en_US
dc.identifier.proquest1338083en_US
dc.identifier.oclc23135726en_US
dc.identifier.bibrecord.b18420023en_US
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