Persistent Link:
http://hdl.handle.net/10150/276877
Title:
Sintering of aluminum-nitride in a microwave induced plasma
Author:
Knittel, Susan Means, 1961-
Issue Date:
1988
Publisher:
The University of Arizona.
Rights:
Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
Abstract:
The sintering of aluminum nitride in a microwave induced plasma was investigated. The plasma furnace consisted of a quartz tube inserted into a waveguide connected to a 2450 MHz microwave generator. After evacuating the tube to about 1.33 mbar, nitrogen gas was introduced, generating a steady plasma. Processing parameters such as gas pressure, power level, and time were optimized to yield maximum densification of aluminum nitride. Sintering of pure and doped AlN compacts was performed in the nitrogen plasma at temperatures up to 2000 S C. Undoped specimens reached densities of only 81% theoretical, while densities in excess of 95% theoretical were achieved for yttria doped specimens in less than 15 minutes. Microstructural investigations revealed a smaller grain size in the plasma sintered specimens (about 2μ) than are present in conventionally sintered AlN (about 8μ).
Type:
text; Thesis-Reproduction (electronic)
Keywords:
Aluminum compounds -- Thermal properties.; Aluminum compounds -- Metallurgy.; Plasma heating.
Degree Name:
M.S.
Degree Level:
masters
Degree Program:
Graduate College; Materials Science and Engineering
Degree Grantor:
University of Arizona
Advisor:
Risbud, Subhash H.

Full metadata record

DC FieldValue Language
dc.language.isoen_USen_US
dc.titleSintering of aluminum-nitride in a microwave induced plasmaen_US
dc.creatorKnittel, Susan Means, 1961-en_US
dc.contributor.authorKnittel, Susan Means, 1961-en_US
dc.date.issued1988en_US
dc.publisherThe University of Arizona.en_US
dc.rightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.en_US
dc.description.abstractThe sintering of aluminum nitride in a microwave induced plasma was investigated. The plasma furnace consisted of a quartz tube inserted into a waveguide connected to a 2450 MHz microwave generator. After evacuating the tube to about 1.33 mbar, nitrogen gas was introduced, generating a steady plasma. Processing parameters such as gas pressure, power level, and time were optimized to yield maximum densification of aluminum nitride. Sintering of pure and doped AlN compacts was performed in the nitrogen plasma at temperatures up to 2000 S C. Undoped specimens reached densities of only 81% theoretical, while densities in excess of 95% theoretical were achieved for yttria doped specimens in less than 15 minutes. Microstructural investigations revealed a smaller grain size in the plasma sintered specimens (about 2μ) than are present in conventionally sintered AlN (about 8μ).en_US
dc.typetexten_US
dc.typeThesis-Reproduction (electronic)en_US
dc.subjectAluminum compounds -- Thermal properties.en_US
dc.subjectAluminum compounds -- Metallurgy.en_US
dc.subjectPlasma heating.en_US
thesis.degree.nameM.S.en_US
thesis.degree.levelmastersen_US
thesis.degree.disciplineGraduate Collegeen_US
thesis.degree.disciplineMaterials Science and Engineeringen_US
thesis.degree.grantorUniversity of Arizonaen_US
dc.contributor.advisorRisbud, Subhash H.en_US
dc.identifier.proquest1335696en_US
dc.identifier.oclc22174056en_US
dc.identifier.bibrecord.b17366938en_US
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