TRENCH ETCHING IN SILICON WITH A CONTROLLABLE SIDEWALL ANGLE (TEMPERATURE)

Persistent Link:
http://hdl.handle.net/10150/276593
Title:
TRENCH ETCHING IN SILICON WITH A CONTROLLABLE SIDEWALL ANGLE (TEMPERATURE)
Author:
Smadi, Mithkal Moh'd, 1960-
Issue Date:
1986
Publisher:
The University of Arizona.
Rights:
Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
Type:
text; Thesis-Reproduction (electronic)
Keywords:
Integrated circuits -- Design and construction.
Degree Name:
M.S.
Degree Level:
masters
Degree Program:
Graduate College; Electrical & Computer Engineering
Degree Grantor:
University of Arizona

Full metadata record

DC FieldValue Language
dc.language.isoen_USen_US
dc.titleTRENCH ETCHING IN SILICON WITH A CONTROLLABLE SIDEWALL ANGLE (TEMPERATURE)en_US
dc.creatorSmadi, Mithkal Moh'd, 1960-en_US
dc.contributor.authorSmadi, Mithkal Moh'd, 1960-en_US
dc.date.issued1986en_US
dc.publisherThe University of Arizona.en_US
dc.rightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.en_US
dc.typetexten_US
dc.typeThesis-Reproduction (electronic)en_US
dc.subjectIntegrated circuits -- Design and construction.en_US
thesis.degree.nameM.S.en_US
thesis.degree.levelmastersen_US
thesis.degree.disciplineGraduate Collegeen_US
thesis.degree.disciplineElectrical & Computer Engineeringen_US
thesis.degree.grantorUniversity of Arizonaen_US
dc.identifier.proquest1328680en_US
dc.identifier.oclc15581682en_US
dc.identifier.bibrecord.b1594640xen_US
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