MICROWAVE CURING FOR TODAY'S SEMICONDUCTOR MANUFACTURING AND MOS CIRCUIT PERFORMANCE.

Persistent Link:
http://hdl.handle.net/10150/275256
Title:
MICROWAVE CURING FOR TODAY'S SEMICONDUCTOR MANUFACTURING AND MOS CIRCUIT PERFORMANCE.
Author:
Chen, Shallop Joan-In.
Issue Date:
1985
Publisher:
The University of Arizona.
Rights:
Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
Type:
text; Thesis-Reproduction (electronic); maps
Keywords:
Microwave heating.; Semiconductor films.; Photoresists.; maps
Degree Name:
M.S.
Degree Level:
masters
Degree Program:
Graduate College; Electrical and Computer Engineering
Degree Grantor:
University of Arizona

Full metadata record

DC FieldValue Language
dc.language.isoen_USen_US
dc.titleMICROWAVE CURING FOR TODAY'S SEMICONDUCTOR MANUFACTURING AND MOS CIRCUIT PERFORMANCE.en_US
dc.creatorChen, Shallop Joan-In.en_US
dc.contributor.authorChen, Shallop Joan-In.en_US
dc.date.issued1985en_US
dc.publisherThe University of Arizona.en_US
dc.rightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.en_US
dc.typetexten_US
dc.typeThesis-Reproduction (electronic)en_US
dc.typemaps-
dc.subjectMicrowave heating.en_US
dc.subjectSemiconductor films.en_US
dc.subjectPhotoresists.en_US
dc.subjectmaps-
thesis.degree.nameM.S.en_US
thesis.degree.levelmastersen_US
thesis.degree.disciplineGraduate Collegeen_US
thesis.degree.disciplineElectrical and Computer Engineeringen_US
thesis.degree.grantorUniversity of Arizonaen_US
dc.identifier.proquest1325258en_US
dc.identifier.oclc13496252en_US
dc.identifier.bibrecord.b15480550en_US
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