OPTICAL AND ELECTRICAL PROPERTIES OF AMORPHOUS SILICON PREPARED BY CHEMICAL VAPOR DEPOSITION AND PLASMA HYDROGENATION.

Persistent Link:
http://hdl.handle.net/10150/274874
Title:
OPTICAL AND ELECTRICAL PROPERTIES OF AMORPHOUS SILICON PREPARED BY CHEMICAL VAPOR DEPOSITION AND PLASMA HYDROGENATION.
Author:
Scheidegger, Gary Louis.
Issue Date:
1983
Publisher:
The University of Arizona.
Rights:
Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
Type:
text; Thesis-Reproduction (electronic)
Keywords:
Hydrogenation.; Silicon -- Electric properties.; Silicon -- Optical properties.; Vapor-plating.
Degree Name:
M.S.
Degree Level:
masters
Degree Program:
Graduate College; Optical Sciences
Degree Grantor:
University of Arizona

Full metadata record

DC FieldValue Language
dc.language.isoen_USen_US
dc.titleOPTICAL AND ELECTRICAL PROPERTIES OF AMORPHOUS SILICON PREPARED BY CHEMICAL VAPOR DEPOSITION AND PLASMA HYDROGENATION.en_US
dc.creatorScheidegger, Gary Louis.en_US
dc.contributor.authorScheidegger, Gary Louis.en_US
dc.date.issued1983en_US
dc.publisherThe University of Arizona.en_US
dc.rightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.en_US
dc.typetexten_US
dc.typeThesis-Reproduction (electronic)en_US
dc.subjectHydrogenation.en_US
dc.subjectSilicon -- Electric properties.en_US
dc.subjectSilicon -- Optical properties.en_US
dc.subjectVapor-plating.en_US
thesis.degree.nameM.S.en_US
thesis.degree.levelmastersen_US
thesis.degree.disciplineGraduate Collegeen_US
thesis.degree.disciplineOptical Sciencesen_US
thesis.degree.grantorUniversity of Arizonaen_US
dc.identifier.proquest1321448en_US
dc.identifier.oclc11065201en_US
dc.identifier.bibrecord.b14640193en_US
dc.identifier.bibrecord.b14640181en_US
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