Persistent Link:
http://hdl.handle.net/10150/195952
Title:
Predicting the Uniformity of Two-Component, Spin Deposited Films
Author:
Haas, Dylan
Issue Date:
2006
Publisher:
The University of Arizona.
Rights:
Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
Abstract:
Various physical parameters of solvents within two component, PMMA + Solvent films are analyzed for their impact upon the coating uniformity of spin deposited PMMA films. Towards this end, a model is presented for describing the surface behavior of spin-on films during the latter stages of deposition, correlating the tendency of a film toward non-uniform deposition to physical characteristics of the spin-on solution. A finite difference solution to this model is presented for two-component, spin-on films that is shown to effectively predict the uniformity of the resulting thin-film layers. The model is then used to determine the impact of specific film parameters upon the predicted spin-on uniformity of the film. Based upon these results, the interdependency between evaporation rate, solvent viscosity, surface tension and rotation rate in determining the uniformity of the spin-on film is evaluated by comparing the model predictions against those found in actual spin-on, two component films. The results from this model are used to provide a physical explanation for why certain surface non-uniformities begin to develop during spin coating.
Type:
text; Electronic Dissertation
Keywords:
spin deposition; spin coating; coating uniformity; optospinogram; iterferometry
Degree Name:
PhD
Degree Level:
doctoral
Degree Program:
Materials Science & Engineering; Graduate College
Degree Grantor:
University of Arizona
Committee Chair:
Simmons, Joseph H.; Birnie, III, Dunbar P.

Full metadata record

DC FieldValue Language
dc.language.isoENen_US
dc.titlePredicting the Uniformity of Two-Component, Spin Deposited Filmsen_US
dc.creatorHaas, Dylanen_US
dc.contributor.authorHaas, Dylanen_US
dc.date.issued2006en_US
dc.publisherThe University of Arizona.en_US
dc.rightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.en_US
dc.description.abstractVarious physical parameters of solvents within two component, PMMA + Solvent films are analyzed for their impact upon the coating uniformity of spin deposited PMMA films. Towards this end, a model is presented for describing the surface behavior of spin-on films during the latter stages of deposition, correlating the tendency of a film toward non-uniform deposition to physical characteristics of the spin-on solution. A finite difference solution to this model is presented for two-component, spin-on films that is shown to effectively predict the uniformity of the resulting thin-film layers. The model is then used to determine the impact of specific film parameters upon the predicted spin-on uniformity of the film. Based upon these results, the interdependency between evaporation rate, solvent viscosity, surface tension and rotation rate in determining the uniformity of the spin-on film is evaluated by comparing the model predictions against those found in actual spin-on, two component films. The results from this model are used to provide a physical explanation for why certain surface non-uniformities begin to develop during spin coating.en_US
dc.typetexten_US
dc.typeElectronic Dissertationen_US
dc.subjectspin depositionen_US
dc.subjectspin coatingen_US
dc.subjectcoating uniformityen_US
dc.subjectoptospinogramen_US
dc.subjectiterferometryen_US
thesis.degree.namePhDen_US
thesis.degree.leveldoctoralen_US
thesis.degree.disciplineMaterials Science & Engineeringen_US
thesis.degree.disciplineGraduate Collegeen_US
thesis.degree.grantorUniversity of Arizonaen_US
dc.contributor.chairSimmons, Joseph H.en_US
dc.contributor.chairBirnie, III, Dunbar P.en_US
dc.contributor.committeememberSimmons, Joseph H.en_US
dc.contributor.committeememberBirnie, III, Dunbar P.en_US
dc.contributor.committeememberPoirier, David R.en_US
dc.contributor.committeememberRaghavan, Srinien_US
dc.identifier.proquest1798en_US
dc.identifier.oclc659746338en_US
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