CHARACTERISTICS AND APPLICATIONS OF A SCANNING NANO-SLIT OPTICAL SENSOR

Persistent Link:
http://hdl.handle.net/10150/195864
Title:
CHARACTERISTICS AND APPLICATIONS OF A SCANNING NANO-SLIT OPTICAL SENSOR
Author:
George, Anoop
Issue Date:
2011
Publisher:
The University of Arizona.
Rights:
Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
Abstract:
In this dissertation, imaging characteristics of a nano-slit are investigated. Applications of a scanning and rotating nano-slit in measuring sub-micron aerial features are demonstrated. Coherent sub-micron spot distributions are reconstructed with a very high contrast. Finally, high NA partially coherent images with features as small as 210 nm half-pitch are reconstructed and the ultimate resolution of the system is determined.A nano-slit is characterized as a sensor for coherent line-and-space features. Experiments and simulation verify image detection with contrasts greater than 0.9. Effects of polarization on imaging performance are reported. A scanning and rotating nano-slit in conjunction with a filtered back-projection technique is used to reconstruct sub-micron coherent spot distributions. Simulation results show very good agreement with the experiment. Further, it is shown that the reconstruction is very resilient to some common random experimental errors.Imaging characteristics of a scanning nano-slit sensor are determined for high NA partially coherent images. Good imaging performance (contrast > 0.8) is demonstrated with line-and-space images up to a spatial frequency of 2.38 lp / micron. Sub-micron features in a high NA partially coherent image are measured with a scanning and rotating nano-slit. A modified microscope is used to create the measured features, including 210 nm half-pitch features that cannot be imaged using the microscope in a conventional imaging mode. Using the filtered back projection technique, two-dimensional sub-micron features are reconstructed by the nano-slit sensor. It is determined that the resolution limit of ~ 200 nm is determined by the reconstruction technique and not by the width of the nano-slit.
Type:
text; Electronic Dissertation
Keywords:
Aerial image; Image reconstruction; Nano apertures; Scanning apertures; Scanning slit; Tomographic imaging
Degree Name:
Ph.D.
Degree Level:
doctoral
Degree Program:
Optical Sciences; Graduate College
Degree Grantor:
University of Arizona
Advisor:
Milster, Thomas D.
Committee Chair:
Milster, Thomas D.

Full metadata record

DC FieldValue Language
dc.language.isoenen_US
dc.titleCHARACTERISTICS AND APPLICATIONS OF A SCANNING NANO-SLIT OPTICAL SENSORen_US
dc.creatorGeorge, Anoopen_US
dc.contributor.authorGeorge, Anoopen_US
dc.date.issued2011en_US
dc.publisherThe University of Arizona.en_US
dc.rightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.en_US
dc.description.abstractIn this dissertation, imaging characteristics of a nano-slit are investigated. Applications of a scanning and rotating nano-slit in measuring sub-micron aerial features are demonstrated. Coherent sub-micron spot distributions are reconstructed with a very high contrast. Finally, high NA partially coherent images with features as small as 210 nm half-pitch are reconstructed and the ultimate resolution of the system is determined.A nano-slit is characterized as a sensor for coherent line-and-space features. Experiments and simulation verify image detection with contrasts greater than 0.9. Effects of polarization on imaging performance are reported. A scanning and rotating nano-slit in conjunction with a filtered back-projection technique is used to reconstruct sub-micron coherent spot distributions. Simulation results show very good agreement with the experiment. Further, it is shown that the reconstruction is very resilient to some common random experimental errors.Imaging characteristics of a scanning nano-slit sensor are determined for high NA partially coherent images. Good imaging performance (contrast > 0.8) is demonstrated with line-and-space images up to a spatial frequency of 2.38 lp / micron. Sub-micron features in a high NA partially coherent image are measured with a scanning and rotating nano-slit. A modified microscope is used to create the measured features, including 210 nm half-pitch features that cannot be imaged using the microscope in a conventional imaging mode. Using the filtered back projection technique, two-dimensional sub-micron features are reconstructed by the nano-slit sensor. It is determined that the resolution limit of ~ 200 nm is determined by the reconstruction technique and not by the width of the nano-slit.en_US
dc.typetexten_US
dc.typeElectronic Dissertationen_US
dc.subjectAerial imageen_US
dc.subjectImage reconstructionen_US
dc.subjectNano aperturesen_US
dc.subjectScanning aperturesen_US
dc.subjectScanning sliten_US
dc.subjectTomographic imagingen_US
thesis.degree.namePh.D.en_US
thesis.degree.leveldoctoralen_US
thesis.degree.disciplineOptical Sciencesen_US
thesis.degree.disciplineGraduate Collegeen_US
thesis.degree.grantorUniversity of Arizonaen_US
dc.contributor.advisorMilster, Thomas D.en_US
dc.contributor.chairMilster, Thomas D.en_US
dc.contributor.committeememberBurge, James H.en_US
dc.contributor.committeememberKupinski, Matthew A.en_US
dc.identifier.proquest11427en_US
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