Electrokinetic characteristics of particulate/liquid interfaces and their importance in contamination from semiconductor process liquids.

Persistent Link:
http://hdl.handle.net/10150/185301
Title:
Electrokinetic characteristics of particulate/liquid interfaces and their importance in contamination from semiconductor process liquids.
Author:
Ali, Iqbal.
Issue Date:
1990
Publisher:
The University of Arizona.
Rights:
Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
Abstract:
Particulate contamination during wafer processing is a major concern in the microelectronics industry. The impurities may be generated from holding tanks, shipping containers, filter membranes and photolithographic materials, and hence may be organic and inorganic in nature. In liquids, these particles develop a surface charge, the magnitude and sign of which is unique for a particular solid/liquid combination. The substrate that is processed in liquids also develops a similar surface charge, and if the charge on the substrate and impurity particles are opposite to each other, deposition of impurities onto the substrate is likely to occur. Hence an understanding of the surface charge characteristics may have an impact in developing techniques to control particulate contamination from semiconductor process liquids. In this work, an attempt has been made to elucidate the surface charge characteristics of a variety of organic and inorganic particles in liquids of interest to the semiconductor industry. The techniques of microelectrophoresis and streaming potential using flat plates and filter membranes were used to this end. The data obtained have been utilized to understand and predict particulate contamination from liquids and deposition onto the wafer surfaces. This might in turn be useful in developing filter membranes of interest to the semiconductor industry.
Type:
text; Dissertation-Reproduction (electronic)
Keywords:
Contamination; Photoresists; Zeta potential.
Degree Name:
Ph.D.
Degree Level:
doctoral
Degree Program:
Materials Science and Engineering; Graduate College
Degree Grantor:
University of Arizona
Advisor:
Risbud, S.H.

Full metadata record

DC FieldValue Language
dc.language.isoenen_US
dc.titleElectrokinetic characteristics of particulate/liquid interfaces and their importance in contamination from semiconductor process liquids.en_US
dc.creatorAli, Iqbal.en_US
dc.contributor.authorAli, Iqbal.en_US
dc.date.issued1990en_US
dc.publisherThe University of Arizona.en_US
dc.rightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.en_US
dc.description.abstractParticulate contamination during wafer processing is a major concern in the microelectronics industry. The impurities may be generated from holding tanks, shipping containers, filter membranes and photolithographic materials, and hence may be organic and inorganic in nature. In liquids, these particles develop a surface charge, the magnitude and sign of which is unique for a particular solid/liquid combination. The substrate that is processed in liquids also develops a similar surface charge, and if the charge on the substrate and impurity particles are opposite to each other, deposition of impurities onto the substrate is likely to occur. Hence an understanding of the surface charge characteristics may have an impact in developing techniques to control particulate contamination from semiconductor process liquids. In this work, an attempt has been made to elucidate the surface charge characteristics of a variety of organic and inorganic particles in liquids of interest to the semiconductor industry. The techniques of microelectrophoresis and streaming potential using flat plates and filter membranes were used to this end. The data obtained have been utilized to understand and predict particulate contamination from liquids and deposition onto the wafer surfaces. This might in turn be useful in developing filter membranes of interest to the semiconductor industry.en_US
dc.typetexten_US
dc.typeDissertation-Reproduction (electronic)en_US
dc.subjectContaminationen_US
dc.subjectPhotoresistsen_US
dc.subjectZeta potential.en_US
thesis.degree.namePh.D.en_US
thesis.degree.leveldoctoralen_US
thesis.degree.disciplineMaterials Science and Engineeringen_US
thesis.degree.disciplineGraduate Collegeen_US
thesis.degree.grantorUniversity of Arizonaen_US
dc.contributor.advisorRisbud, S.H.en_US
dc.contributor.committeememberRaghavan, S.en_US
dc.identifier.proquest9114050en_US
dc.identifier.oclc706487465en_US
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