THREE-BEAM SHEARING INTERFEROMETER FOR MEASURING THIN FILM THICKNESS, SURFACE ROUGHNESS, AND SURFACE FIGURE.

Persistent Link:
http://hdl.handle.net/10150/185238
Title:
THREE-BEAM SHEARING INTERFEROMETER FOR MEASURING THIN FILM THICKNESS, SURFACE ROUGHNESS, AND SURFACE FIGURE.
Author:
Almarzouk, Kais
Issue Date:
1982
Publisher:
The University of Arizona.
Rights:
Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.
Abstract:
A three-beam lateral shearing interferometer has been developed. The three-beam shearing interferograms consist of two sets of fringes, one of which acts as a carrier whose intensity is modulated by the second set. The depth of modulation is directly proportional to the phase difference between the middle beam and the outer beams. Phase errors on the order of π/2 cause every other fringe to go from complete dark to complete bright. Therefore, phase errors much smaller than π/2 can be detected. The three-beam interferometer is implemented in three ways: (1) thin film thickness measurement, (2) surface roughness measurement, and (3) surface figure measurement. The three-beam interferometer implemented to measure thin film thickness and surface roughness is accurate to 25 Å. Surfaces with different microstructure are characterized. We have found that each of those surfaces may have one or more of the following: (1) random roughness, (2) slow waviness, and/or (3) periodic structure. The three-beam interferometer is also implemented for testing optical surfaces. The three-beam interferometer is more capable in detecting small zonal errors than the two-beam interferometer. Three-beam interferograms of different surfaces are produced and analyzed. The three-beam interferometer has many advantages: (1) it is a stable, common path interferometer, (2) white light can be instead of coherent light to get rid of the effects of speckle and dust particles, and (3) it is a very low cost interferometer.
Type:
text; Dissertation-Reproduction (electronic)
Keywords:
Interferometers.; Thin films -- Measurement.; Surfaces (Technology) -- Measurement.; Surface roughness -- Measurement.
Degree Name:
Ph.D.
Degree Level:
doctoral
Degree Program:
Optical Sciences; Graduate College
Degree Grantor:
University of Arizona
Advisor:
Parks, R.

Full metadata record

DC FieldValue Language
dc.language.isoenen_US
dc.titleTHREE-BEAM SHEARING INTERFEROMETER FOR MEASURING THIN FILM THICKNESS, SURFACE ROUGHNESS, AND SURFACE FIGURE.en_US
dc.creatorAlmarzouk, Kaisen_US
dc.contributor.authorAlmarzouk, Kaisen_US
dc.date.issued1982en_US
dc.publisherThe University of Arizona.en_US
dc.rightsCopyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author.en_US
dc.description.abstractA three-beam lateral shearing interferometer has been developed. The three-beam shearing interferograms consist of two sets of fringes, one of which acts as a carrier whose intensity is modulated by the second set. The depth of modulation is directly proportional to the phase difference between the middle beam and the outer beams. Phase errors on the order of π/2 cause every other fringe to go from complete dark to complete bright. Therefore, phase errors much smaller than π/2 can be detected. The three-beam interferometer is implemented in three ways: (1) thin film thickness measurement, (2) surface roughness measurement, and (3) surface figure measurement. The three-beam interferometer implemented to measure thin film thickness and surface roughness is accurate to 25 Å. Surfaces with different microstructure are characterized. We have found that each of those surfaces may have one or more of the following: (1) random roughness, (2) slow waviness, and/or (3) periodic structure. The three-beam interferometer is also implemented for testing optical surfaces. The three-beam interferometer is more capable in detecting small zonal errors than the two-beam interferometer. Three-beam interferograms of different surfaces are produced and analyzed. The three-beam interferometer has many advantages: (1) it is a stable, common path interferometer, (2) white light can be instead of coherent light to get rid of the effects of speckle and dust particles, and (3) it is a very low cost interferometer.en_US
dc.typetexten_US
dc.typeDissertation-Reproduction (electronic)en_US
dc.subjectInterferometers.en_US
dc.subjectThin films -- Measurement.en_US
dc.subjectSurfaces (Technology) -- Measurement.en_US
dc.subjectSurface roughness -- Measurement.en_US
thesis.degree.namePh.D.en_US
thesis.degree.leveldoctoralen_US
thesis.degree.disciplineOptical Sciencesen_US
thesis.degree.disciplineGraduate Collegeen_US
thesis.degree.grantorUniversity of Arizonaen_US
dc.contributor.advisorParks, R.en_US
dc.identifier.proquest8306447en_US
dc.identifier.oclc688223874en_US
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